Zheng, Lei; Zywietz, Urs; Birr, Tobias; Duderstadt, Martin; Overmeyer, Ludger; Roth, Bernhard; Reinhardt, Carsten
(London : Macmillan Publishers Limited, SpringerNature, 2021)
The advancement of micro- and nanostructuring techniques in optics is driven by the demand for continuous miniaturization and the high geometrical accuracy of photonic devices and integrated systems. Here, UV-LED projection ...